Micro Magnetic Field Sensors Manufactured Using a Standard 0.18-μm CMOS Process
作者： Yen-Nan Lin , Ching-Liang Dai
DOI: 10.3390/MI9080393
关键词: Biasing 、 Fabrication 、 Sense (electronics) 、 Common emitter 、 Sensitivity (electronics) 、 Hall effect 、 CMOS 、 Materials science 、 Magnetic field 、 Optoelectronics
摘要: Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS) technology are investigated. The MMF sensors, which a three-axis sensing type, include magnetotransistor and four Hall elements. is utilized to detect the (MF) in x-axis y-axis, elements used sense MF z-axis. In addition emitter, bases collectors, additional collectors added magnetotransistor. enhance bias current carrier number, so that sensor sensitivity enlarged. fabrication easy because it does not require post-CMOS processing. Experiments depict 0.69 V/T its 0.55 y-axis MF.
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sci-hub.se 参考文章(31)
Chen-Hsuan Hsieh, Ching-Liang Dai, Ming-Zhi Yang, Fabrication and characterization of CMOS-MEMS magnetic microsensors. Sensors. ,vol. 13, pp. 14728- 14739 ,(2013) , 10.3390/S131114728
Wei-Zhen Liao, Ching-Liang Dai, Ming-Zhi Yang, Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process Sensors. ,vol. 13, pp. 12760- 12770 ,(2013) , 10.3390/S131012760
Hava Can, Uğur Topal, Design of Ring Core Fluxgate Magnetometer as Attitude Control Sensor for Low and High Orbit Satellites Journal of Superconductivity and Novel Magnetism. ,vol. 28, pp. 1093- 1096 ,(2015) , 10.1007/S10948-014-2788-5
Ching-Liang Dai, Hsuan-Jung Peng, Mao-Chen Liu, Chyan-Chyi Wu, Heng-Ming Hsu, Lung-Jieh Yang, None, A Micromachined Microwave Switch Fabricated by the Complementary Metal Oxide Semiconductor Post-Process of Etching Silicon Dioxide Japanese Journal of Applied Physics. ,vol. 44, pp. 6804- 6809 ,(2005) , 10.1143/JJAP.44.6804
Jian-Zhi Tseng, Chyan-Chyi Wu, Ching-Liang Dai, Modeling and manufacturing of a micromachined magnetic sensor using the CMOS process without any post-process. Sensors. ,vol. 14, pp. 6722- 6733 ,(2014) , 10.3390/S140406722
Ming-Zhi Yang, Ching-Liang Dai, Wei-Yi Lin, Fabrication and characterization of polyaniline/PVA humidity microsensors. Sensors. ,vol. 11, pp. 8143- 8151 ,(2011) , 10.3390/S110808143
Ching-Liang Dai, Jing-Hung Chiou, Michael Shiang-Cheng Lu, A maskless post-CMOS bulk micromachining process and its application Journal of Micromechanics and Microengineering. ,vol. 15, pp. 2366- 2371 ,(2005) , 10.1088/0960-1317/15/12/019
Chih-Cheng Lu, Yu-Ting Liu, Fang-Yu Jhao, Jen-Tzong Jeng, Responsivity and noise of a wire-bonded CMOS micro-fluxgate sensor Sensors and Actuators A-physical. ,vol. 179, pp. 39- 43 ,(2012) , 10.1016/J.SNA.2012.03.008
Guo-Ming Sung, Chih-Ping Yu, 2-D Differential Folded Vertical Hall Device Fabricated on a P-Type Substrate Using CMOS Technology IEEE Sensors Journal. ,vol. 13, pp. 2253- 2262 ,(2013) , 10.1109/JSEN.2013.2246564
Vincent Beroulle, Yves Bertrand, Laurent Latorre, Pascal Nouet, Monolithic piezoresistive CMOS magnetic field sensors Sensors and Actuators A-physical. ,vol. 103, pp. 23- 32 ,(2003) , 10.1016/S0924-4247(02)00317-5