Energy flux to the substrate in a magnetron discharge with hollow cathode
作者： N.P. Poluektov , Yu P. Tsar'gorodsev , I.I. Usatov , A.G. Evstigneev
DOI: 10.1016/J.TSF.2017.08.048
关键词: Buffer gas 、 Chemistry 、 Heat flux 、 Energy flux 、 Atomic physics 、 Plasma parameters 、 Langmuir probe 、 Plasma 、 Power density 、 High-power impulse magnetron sputtering
摘要: … was measured in a hollow cathode magnetron (HCM) … energy flux is created by the charged particles of the buffer gas. We … Number of the high-energy reflected argon neutrals depends …
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