In-Situ Observation of Co-Ce Coated Metallic Interconnect Oxidation Combined with High-Resolution Post Exposure Analysis
作者： Stéphane Poitel , Zhujun Wang , Marc Willinger , Jan Van herle , Cécile Hébert
关键词: High resolution 、 Nanotechnology 、 Metallic interconnect 、 In situ 、 Post exposure 、 Materials science
摘要:
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