Semiconductor device providing a first electrical conductor and a second electrical conductor in one through hole and method for manufacturing the same
作者： Satoshi Matsui
DOI:
关键词: Electrode 、 Electrical conductor 、 Silicon 、 Electrical engineering 、 Spark plug 、 Optoelectronics 、 Substrate (electronics) 、 Materials science 、 Semiconductor device
摘要: A semiconductor device 100 is provided with a multiplex through plug 111 that fills an opening extending the silicon substrate 101. The plugs comprises column-shaped and solid first electrode 103, insulating film 105 covers cylindrical face of second 107 109 107, these have common central axis. upper cross sections 105, are annular-shaped.
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