Secondary emission mass spectrometer mechanism to be used with other instrumentation

摘要: There is disclosed a secondary ion mass spectrometer to be used with other spectro analysis mechanisms where the sample holder fixed in main vacuum chamber having communicating seal between two which substantially 90° spherical segment energy analyzer disposed second along quadrupole and electron multiplier. A primary gun within directing an beam at samples tested ions emitted are collected through longitudinal extraction lens mechanism connected linear movement device focus withdraw respect plurality of blanking plates for deflecting certain from outside selected area controlled electronic switching means that controls so only being tested. The moveable lateral axes axis extending