Micromachines: The Role of the Mechanisms Community

作者: G. K. Ananthasuresh

DOI: 10.1007/978-94-007-1300-0_12

关键词: EngineeringMicrofabricationSystems engineeringScope (project management)Field (Bourdieu)

摘要: Micromachines is a mature field today, although it usually known by other names in various parts of the world. We briefly review genesis this and how mechanisms researchers became involved. The successes are many have led to creation number commercial products. This success partly due research but more significantly rapid developments microfabrication technology. discuss influence limitations techniques on used field. Interestingly, strategies that were developed for overcoming these extended scope machines influencing technologies beyond realm micromachines. Many challenges lie ahead multi-disciplinary approaches combined with will prove be beneficial coming years.

参考文章(18)
Shih-Chi Chen, Martin L. Culpepper, Design of a six-axis micro-scale nanopositioner—μHexFlex Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology. ,vol. 30, pp. 314- 324 ,(2006) , 10.1016/J.PRECISIONENG.2005.11.002
Mehregany, K.J. Gabriel, W.S.N. Trimmer, Micro gears and turbines etched from silicon Sensors and Actuators. ,vol. 12, pp. 341- 348 ,(1987) , 10.1016/0250-6874(87)80054-9
Girish Krishnan, G. K. Ananthasuresh, Evaluation and Design of Displacement-Amplifying Compliant Mechanisms for Sensor Applications Journal of Mechanical Design. ,vol. 130, pp. 102304- ,(2008) , 10.1115/1.2965599
L.M. Roylance, J.B. Angell, A batch-fabricated silicon accelerometer IEEE Transactions on Electron Devices. ,vol. 26, pp. 1911- 1917 ,(1979) , 10.1109/T-ED.1979.19795
James B. Angell, Stephen C. Terry, Phillip W. Barth, Silicon micromechanical devices Scientific American. ,vol. 248, pp. 44- 55 ,(1983) , 10.1038/SCIENTIFICAMERICAN0483-44
M. Mehregany, S.F. Bart, L.S. Tavrow, J.H. Lang, S.D. Senturia, M.F. Schlecht, A study of three microfabricated variable-capacitance motors Sensors and Actuators A-physical. ,vol. 21, pp. 173- 179 ,(1990) , 10.1016/0924-4247(90)85033-Z
Albert P. Pisano, Resonant-structure Micromotors: Historical Perspective and Analysis Sensors and Actuators. ,vol. 20, pp. 83- 89 ,(1989) , 10.1016/0250-6874(89)87105-7
S. Kota, G. K. Ananthasuresh, S. B. Crary, K. D. Wise, Design and Fabrication of Microelectromechanical Systems Journal of Mechanical Design. ,vol. 116, pp. 1081- 1088 ,(1994) , 10.1115/1.2919490
L. L. Howell, A. Midha, T. W. Norton, Evaluation of equivalent spring stiffness for use in a pseudo-rigid-body model of large-deflection compliant mechanisms Journal of Mechanical Design. ,vol. 118, pp. 126- 131 ,(1996) , 10.1115/1.2826843
Harold A. Rothbart,, Dennis L. Klipp ,, Cam design handbook Journal of Mechanical Design. ,vol. 126, pp. 375- 375 ,(2004) , 10.1115/1.1723466