A study of three microfabricated variable-capacitance motors
作者： M. Mehregany , S.F. Bart , L.S. Tavrow , J.H. Lang , S.D. Senturia
DOI: 10.1016/0924-4247(90)85033-Z
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摘要: Abstract This paper discusses the design, microfabrication, operating principles and experimental testing of three types rotary variable-capacitance micromotors. The advantages disadvantages these motors are discussed. motor top-drive, side-drive harmonic side-drive. In this work, micromotors surface micromachined using heavily-phosphorus-doped polysilicon for structural material, deposited oxide sacrificial layers LPCVD nitride electrical isolation. Frictional forces associated with electric pull-down on rotor dominant in fabricated tested to date. Air drive excitation have been used studying effects. Side-drive successfully operated by a three-phase signal rotors air-levitated. With air levitation, successful operation is achieved at bipolar excitations greater than 80 V across 4 μm air-gap having eight twelve stator poles, only half poles excited. Motor sustained indefinitely.
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