Defect clustering in GaN irradiated with O+ ions

作者: Chong M Wang , Weilin Jiang , William J Weber , Larry E Thomas

DOI: 10.1557/JMR.2002.0427

关键词: IrradiationMicrostructureDislocationMaterials scienceLattice (order)CrystallographyStackingIonTransmission electron microscopyCrystallographic defect

摘要: Transmission electron microscopy (TEM) was used to study microstructures formed in GaN irradiated with 600-keV O+ ions at room temperature. Three types of defect clusters were identified the GaN: (i) basal-plane stacking faults dimensions ranging from 5 30 nm, (ii) pyramidal dislocation loops, and (iii) local regions highly disordered material. High-resolution TEM imaging clearly revealed that one type corresponded insertion extra Ga–N basal plane otherwise perfect lattice. The interpretation these results indicated interstitials both Ga N preferentially condensed on form a new layer under irradiation conditions. formation extended defects their interactions point produced during contributed dramatic increase dynamic recovery

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