Circuit structures and methods with beol layers configured to block electromagnetic edge interference
作者： James Randal Moulic , Choongyeun Cho , Moon Ju Kim , Jonghae Kim , Daeik Kim
DOI:
关键词: Edge (geometry) 、 Electromagnetic interference 、 Electronic engineering 、 Engineering 、 Electrical conductor 、 Interference (communication) 、 Optoelectronics 、 Block (telecommunications) 、 Integrated circuit 、 Wavelength
摘要: Back-end-of-line (BEOL) circuit structures and methods are provided for blocking externally-originating or internally-originating electromagnetic edge interference. One such BEOL structure includes a semiconductor substrate supporting one more integrated circuits, multiple layers disposed over the substrate. The extend to an of include at least vertically-extending conductive pattern adjacent structure. is defined, partially, by plurality elements in layers. uniformly arrayed first direction second throughout portion thereof. sized positioned block interference particular wavelength from passing therethrough.
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