Deposition of c-Axis Aligned Crystalline InGaZnO by Mist Atmospheric Pressure Chemical Vapor Deposition for Thin-Film Transistor Applications
作者： Han-Yin Liu , Hao-Chun Hung , Wei-Ting Chen
关键词: Thin-film transistor 、 Analytical chemistry 、 Indium tin oxide 、 Amorphous solid 、 Threshold voltage 、 X-ray photoelectron spectroscopy 、 Band gap 、 Sputtering 、 Annealing (metallurgy) 、 Materials science
摘要: … Abstract—This study uses mist atmospheric pressure chemical vapor deposition with … TFT. The threshold voltage of the present CAAC-InGaZnO TFT changes −0.4 V when the TFT …
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