Two-layer resist process for printing thick patterns by exploiting a maskless projection exposure system using a liquid-crystal-display panel
作者： Toshiyuki Horiuchi , Hayato Okiyama , Ryuta Sato , Hiroshi Kobayashi
DOI: 10.35848/1347-4065/AB7438
关键词: Resist 、 Maskless lithography 、 Optics 、 Projection (set theory) 、 Two layer 、 Liquid-crystal display 、 Materials science 、 Process (computing)
摘要:
harvard.edu
sci-hub.se 参考文章(38)
Soichiro Koyama, Kenji Saito, Toshiyuki Horiuchi, Projection exposure using a projector with highly minute liquid crystal display panels Photomask and Next-Generation Lithography Mask Technology XX. ,vol. 8701, ,(2013) , 10.1117/12.2027570
Kin Fong Lei, Min-Hsien Wu, Che-Wei Hsu, Yi-Dao Chen, Real-time and non-invasive impedimetric monitoring of cell proliferation and chemosensitivity in a perfusion 3D cell culture microfluidic chip. Biosensors and Bioelectronics. ,vol. 51, pp. 16- 21 ,(2014) , 10.1016/J.BIOS.2013.07.031
Toshiyuki Horiuchi, Soichiro Koyama, Hiroshi Kobayashi, Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector Microelectronic Engineering. ,vol. 141, pp. 37- 43 ,(2015) , 10.1016/J.MEE.2015.01.003
Kazumitsu Nakamura, Hiroshi Kubota, Akira Nakada, Tsuneo Inokuchi, Kouji Kosaka, Development of reticle-free exposure method with LCD projection image Photomask and next-generation lithography mask technology. Conference. ,vol. 4754, pp. 737- 744 ,(2002) , 10.1117/12.476958
Toshiyuki Horiuchi, Yusuke Furuuchi, Ryota Nakamura, Katsunori Hirota, Micro-gear fabrication using optical projection lithography on copper-clad plastic substrates and electroplating of nickel Microelectronic Engineering. ,vol. 83, pp. 1316- 1320 ,(2006) , 10.1016/J.MEE.2006.01.083
Vincenzo F. Curto, Cormac Fay, Shirley Coyle, Robert Byrne, Corinne O’Toole, Caroline Barry, Sarah Hughes, Niall Moyna, Dermot Diamond, Fernando Benito-Lopez, Real-time sweat pH monitoring based on a wearable chemical barcode micro-fluidic platform incorporating ionic liquids Sensors and Actuators B-chemical. ,vol. 171, pp. 1327- 1334 ,(2012) , 10.1016/J.SNB.2012.06.048
Gianluca Grenci, Enrico Sovernigo, Ali Z. Khokhar, Nikolaj Gadegaard, Mauro Prasciolu, Massimo Tormen, Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography Sensors and Actuators A-physical. ,vol. 205, pp. 111- 118 ,(2014) , 10.1016/J.SNA.2013.09.036
Marshal Dhayal, Hyung Gon Jeong, Jeong Sik Choi, Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices Applied Surface Science. ,vol. 252, pp. 1710- 1715 ,(2005) , 10.1016/J.APSUSC.2005.03.198
Jinho Kim, John P. Hilton, Kyung-Ae Yang, Renjun Pei, Milan Stojanovic, Qiao Lin, Nucleic Acid Isolation and Enrichment on a Microchip. Sensors and Actuators A-physical. ,vol. 195, pp. 183- 190 ,(2013) , 10.1016/J.SNA.2012.07.022
Kejun Zhong, Yiqing Gao, Feng Li, Zhimin Zhang, Ningning Luo, Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique Optik. ,vol. 125, pp. 2413- 2416 ,(2014) , 10.1016/J.IJLEO.2013.10.082