System for manufacturing flat panel display
作者： Byung-II Lee , Young-Ho Lee , Taek-Yong Jang
DOI:
关键词: Optoelectronics 、 Flat panel display 、 Materials science 、 Substrate (printing) 、 Electronic engineering
摘要: A system for manufacturing a flat panel display includes substrate storage part storing plurality of substrates; first chamber including loading the transfer part, disposed between and chamber, an end effector transferring substrates part; second source gas supplying uniformly to entire surface heating powder evaporating in order supply part.
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