Micromachined S-shaped actuator
作者： M. Shikida , K. Sato , T. Harada
关键词: Microelectrode 、 Materials science 、 Electrical engineering 、 Electrode 、 Microactuator 、 Voltage 、 Optoelectronics 、 Flow control (fluid) 、 Actuator 、 Surface micromachining 、 Wafer
摘要: We report on a new type of micromachined electrostatic actuator with an S-shaped film element. The consists pair planar electrodes between them. S-bend moves back and forth through switching applied voltage to each electrode plate. An advantage this is that it allows vertical displacement the order several hundreds micrometers. suitable for gas control devices which require large conductance under rarefied pressure conditions. made prototype microactuator by using micromachining technologies. It was composed three stacked wafers. succeeded in constructing element structure height 220 /spl mu/m thickness 0.4 mu/m. able be operated force when about 70 V.
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