An Electrostatically Operated Torsion Mirror For Optical Switching Device

摘要: Electrostatically operated micro torsion mirrors for a new concept of optical switching matrix is presented. The structure composed mirror (400/spl mu/m x 400/spl in area and 30/spl thickness) beams (14/spl wide, 320,/spl long, 0.3/spl thick). free-standing over through hole made by reactive ion etching the substrate from backside. Owing to double-step RIE, there silicon mesa only on backside keep it flat rigid, A diaphragm oxide employed as temporary support successfully release fragile structures. Characteristics electrostatic operation were determined.