作者: Neelakandan Santhosh , Gregor Filipič , Elena Tatarova , Oleg Baranov , Hiroki Kondo
DOI: 10.3390/MI9110565
关键词: Chemical vapor deposition 、 Materials science 、 Plasma-enhanced chemical vapor deposition 、 Electronics 、 Plasma activation 、 Plasma processing 、 Plasma 、 Carbon 、 Nanotechnology 、 Surface modification
摘要: … This influence of breakdown voltage on gas dissociation is described by Paschen’s law [89]. A Paschen’s curve indicates that the breakdown voltage decreases with decreasing p and d…