Oriented Carbon Nanostructures by Plasma Processing: Recent Advances and Future Challenges.

作者: Neelakandan Santhosh , Gregor Filipič , Elena Tatarova , Oleg Baranov , Hiroki Kondo

DOI: 10.3390/MI9110565

关键词: Chemical vapor depositionMaterials sciencePlasma-enhanced chemical vapor depositionElectronicsPlasma activationPlasma processingPlasmaCarbonNanotechnologySurface modification

摘要: … This influence of breakdown voltage on gas dissociation is described by Paschen’s law [89]. A Paschen’s curve indicates that the breakdown voltage decreases with decreasing p and d…

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