Incorporation of dielectric layer onto SThM tips for direct thermal analysis
作者： Yung Fu Chong , Kin Leong Pey , Chang Chaun Hu , Lap Chan , Chim Wai Kin
DOI:
关键词: Thermistor 、 Optoelectronics 、 Nanotechnology 、 Current (fluid) 、 Materials science 、 Coating 、 Layer (electronics) 、 Thermal conductivity 、 Thermal analysis 、 Thermocouple 、 Electrical conductor
摘要: One of the limitations to current usage scanning thermal microscopes arises when one needs obtain a map an electrically biased specimen. Current practice is for conductive parts specimen be passivated prevent excessive leakage between tip and sample. The present invention eliminates need this by coating probe's microtip with layer insulation that also good conductor. Examples both thermocouple thermistor based probes are given along processes their manufacture.
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