Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment
作者： Yong Jin Lee , Mehrdad M. Moslehi
DOI:
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摘要: This invention presents an automatic calibration system and method for of a substrate temperature sensor in thermal processing equipment, such as rapid system. The includes temperature-sensitive probe associated with the to calibrate actuator position relative during cycle. can be incorporated into equipment order maintain cleanliness integrity cycle, allow automated calibration. In preferred embodiment this invention, its are implemented gas showerhead assembly
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