Temperature and relative density of atomic hydrogen in a multicusp H− volume source

摘要: The Balmer β and γ line shapes have been analyzed to determine the relative density temperature of hydrogen atoms in magnetic multicusp plasma generators. Results for a 90‐V, 4–40‐mTorr, 1–18‐A conventional generator 50‐V, 4‐mTorr, 1–15‐A hybrid are presented. number increased smoothly with pressure discharge current but never exceeded 10%. absolute atomic 90‐V 10‐A varied proportion pressure. (in 0.1–0.4‐eV range) decreased slowly current. role processes determining H− H2 vibrational rotational temperatures is discussed. results confirm that negative‐ion sources collisional excitation ground state molecules by energetic electrons dominant process Balmer‐β ‐γ light emission.