Single‐crystal Sr2Nb2O7film optical waveguide deposited by rf sputtering
作者： Akihiko Ishitani , Masakazu Kimura
DOI: 10.1063/1.89068
关键词: Sputtering 、 Materials science 、 Substrate (electronics) 、 Single crystal 、 Optics 、 Limiting oxygen concentration 、 Waveguide (optics) 、 Physics and Astronomy (miscellaneous)
摘要: A new optical waveguide of a single‐crystal Sr2Nb2O7 film grown onto b‐plate Sr2Ta2O7 substrate by rf sputtering is reported. Waveguide propagation loss was 7.6 dB/cm for the TE0 mode at 6328 A. An increased oxygen concentration in gas effective lowering loss.
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