Rf-sputtered epitaxial films of Bi12TiO20 on Bi12GeO20 for optical waveguiding

作者: T. Mitsuyu , K. Wasa , S. Hayakawa

DOI: 10.1016/0022-0248(77)90108-7

关键词:

摘要: Abstract Single-crystal films of Bi12TiO20 were epitaxially grown on Bi12GeO20 substrates by rf-sputtering from a stoichiometric target at the substrate temperature 400–450°C. Optical waveguiding 6328 A He-Ne laser light was successfully carried out using films. propagation loss 15 dB/cm observed for TE0 mode in 2.4 μm thick film. The refractive index film determined to be 2.570.

参考文章(16)
W. J. Takei, N. P. Formigoni, M. H. Francombe, Preparation and Epitaxy of Sputtered Films of Ferroelectric Bi4Ti3O12 Journal of Vacuum Science and Technology. ,vol. 7, pp. 442- 448 ,(1970) , 10.1116/1.1492894
Tsuneo Mitsuyu, Kiyotaka Wasa, Shigeru Hayakawa, Structures and Optical Properties of Rf‐Sputtered Bi12GeO20 Films Journal of The Electrochemical Society. ,vol. 123, pp. 94- 96 ,(1976) , 10.1149/1.2132773
V.J. Silvestri, T.O. Sedgwick, J.B. Landermann, Vapor growth of Bi12GeO20, γ-Bi2O3 and BiOCl Journal of Crystal Growth. ,vol. 20, pp. 165- 168 ,(1973) , 10.1016/0022-0248(73)90134-6
Albert A. Ballman, The growth and properties of piezoelectric bismuth germanium oxide Bi12GeO20 Journal of Crystal Growth. ,vol. 1, pp. 37- 40 ,(1967) , 10.1016/0022-0248(67)90004-8
Tatsuru Iwasa, Chemical etching and fabrication of ridge waveguides on Bi12GeO20 single crystals Journal of Applied Physics. ,vol. 47, pp. 2746- 2748 ,(1976) , 10.1063/1.323000
A.A. Ballman, H. Brown, P.K. Tien, S. Riva-Sanseverino, The growth of LiNbO3 thin films by liquid phase epitaxial techniques Journal of Crystal Growth. ,vol. 29, pp. 289- 295 ,(1975) , 10.1016/0022-0248(75)90173-6
G. Gattow, H. Schr�der, Über Wismutoxide. III. Die Kristallstruktur der Hochtemperaturmodifikation von Wismut(III)‐oxid (δ‐Bi2O3) Zeitschrift für anorganische und allgemeine Chemie. ,vol. 318, pp. 176- 189 ,(1962) , 10.1002/ZAAC.19623180307
P. K. Tien, Light waves in thin films and integrated optics. Applied Optics. ,vol. 10, pp. 2395- 2413 ,(1971) , 10.1364/AO.10.002395
T. Mitsuyu, K. Wasa, S. Hayakawa, Piezoelectric thin films of rf‐sputtered Bi12PbO19 Journal of Applied Physics. ,vol. 47, pp. 2901- 2902 ,(1976) , 10.1063/1.323068
Akihiko Ishitani, Masakazu Kimura, Single‐crystal Sr2Nb2O7film optical waveguide deposited by rf sputtering Applied Physics Letters. ,vol. 29, pp. 289- 291 ,(1976) , 10.1063/1.89068