Fabrication of La2Ti2O7 thin films by a sol-gel technique

作者: A. V. Prasadarao , U. Selvaraj , S. Komarneni , A. S. Bhalla

DOI: 10.1080/07315179208203344

关键词: CoatingMicrostructureSol-gelAnnealing (metallurgy)TitaniumScanning electron microscopeThin filmCarbon filmMaterials scienceChemical engineering

摘要: Abstract Sol-gel thin films of La2Ti2O17 were deposited on fused silica and Si( 100) substrates by a spin-coating process. The precursor solution for the was prepared from lanthanum acetylacetonate titanium iso-propoxide dissolved in 2-methoxyethanol. Crystalline crack-free ∼ 0.3 μm thickness above sulastrates using single coating followed annealing at temperature 800 "C. Microstructural studies revealed that these contained extremely fine grains 0.1 μm. Thin film X-ray diffraction patterns indicated formation grain oriented along [100] direction substrates.

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