Morphological properties of sputtered MoS2 films

作者: V. Buck

DOI: 10.1016/0043-1648(83)90073-X

关键词: Morphology (linguistics)Composite materialMaterials scienceTribologyDeposition processMetallurgyOrientation (graph theory)

摘要: Abstract As the lubricating properties of MoS2 are due to sliding lamellae, crystallographic orientation and structural these lamellae important for tribological behaviour. Thus an analysis growth morphology sputtered films was carried out. It is shown that morphological can be influenced by parameters deposition process; in particular, it possible prepare coatings which oriented parallel each other.

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