Deposition of MoS sub 2 films by physical sputtering and their lubrication properties in vacuum.

作者: T. Spalvins

DOI: 10.1080/05698196908972244

关键词:

摘要: Physical d-c sputtering of MoS2 was used to apply films for as a solid lubricant on rotating and sliding components. This method does not utilize binders or burnishing. Friction experiments in vacuum (10−11 torr) were conducted these (approx. 2000 A thick). The coefficient friction similar the reported values resin bonded 0.03–0.08. long endurance life indicates good adherence. adherence results from cleanliness surface (etched) relatively high energies sputtered material arrival at surface. These consistent regard stoichiometry, adherence, thickness, uniformity when conditions accurately controlled run run. Presented an American Society Lubrication Engineers paper ASME/ASLE Conference held Atlantic City. New Jersey, October 8–10, 1968. 1Some this information has been published N...

参考文章(12)
R. L. Johnson, D. H. Buckley, M. A. Swikert, Studies of Lubricating Materials in Vacuum ,(1964)
T. Spalvins, D. H. Buckley, Vapor Deposited Gold Thin Films as Lubricants in Vacuum (10−11 mm Hg) Journal of Vacuum Science and Technology. ,vol. 3, pp. 107- 113 ,(1966) , 10.1116/1.1492462
A.J. Haltner, C.S. Oliver, Frictional Properties of Some Solid Lubricant Films under High Load. Journal of Chemical & Engineering Data. ,vol. 6, pp. 128- 130 ,(1961) , 10.1021/JE60009A026
Martin Julian Buerger, Leonid V. Azároff, The Powder Method in X-ray Crystallography ,(1958)
J. K. Lancaster, Lubrication by Transferred Films of Solid Lubricants Tribology Transactions. ,vol. 8, pp. 146- 155 ,(1965) , 10.1080/05698196508972088
A. J. Haltner, Sliding Behavior of Some Layer Lattice Compounds in Ultrahigh Vacuum Tribology Transactions. ,vol. 9, pp. 136- 148 ,(1966) , 10.1080/05698196608972129
Eric Kay, Impact Evaporation and Thin Film Growth in a Glow Discharge Advances in electronics and electron physics. ,vol. 17, pp. 245- 322 ,(1963) , 10.1016/S0065-2539(08)60027-X
A. W. J. De Gee, G. Salomon, J. H. Zaat, On the Mechanisms of MoS2-Film Failure in Sliding Friction Tribology Transactions. ,vol. 8, pp. 156- 163 ,(1965) , 10.1080/05698196508972089
T. K. BIERLEIN, H. W. NEWKIRK, B. MASTEL, Etching of Refractories and Cermets by Ion Bombardment Journal of the American Ceramic Society. ,vol. 41, pp. 196- 200 ,(1958) , 10.1111/J.1151-2916.1958.TB13540.X