Esca and reels characterization of electrically conductive polyimide obtained by ion bombardment in the keV range
作者： Giovanni Marletta , Carmelo Oliveri , Giuseppe Ferla , Salvatore Pignataro
关键词: Materials science 、 Ion 、 Range (particle radiation) 、 Carbonization 、 Polyamide 、 Polymer 、 Polyimide 、 Electrical resistivity and conductivity 、 Amorphous carbon 、 Analytical chemistry
摘要: Polymide films were bombarded with Ar+ at 150 keV various doses from 5 × 1012 to 2 1017 ions cm−2. Ion bombardment was found produce a drastic decrease of the electrical resistivity polymide about 1016 3 10−3 Ω cm, effect being dependent on ion dose. The chemical structure conductive obtained characterized by means ESCA and REELS techniques. modification original polymer seems proceed low (up 1014 cm−2) progressive elimination carbonyl groups related destruction imidic rings, while high (from 1015 carbonization polyimide occurs production an amorphous carbon still containing significant amount residual N O atoms.
sci-hub.se 参考文章(25)
K. L. Mittal, Polyimides : synthesis, characterization, and applications Plenum. ,(1984)
R. Schlögl, H.P. Boehm, Influence of crystalline perfection and surface species on the X-ray photoelectron spectra of natural and synthetic graphites Carbon. ,vol. 21, pp. 345- 358 ,(1983) , 10.1016/0008-6223(83)90127-6
Shoji Noda, Tatsumi Hioki, ESR study of carbonization of polyimide (Kapton H) film induced by 1 MeV N2+-irradiation Carbon. ,vol. 22, pp. 359- 361 ,(1984) , 10.1016/0008-6223(84)90006-X
T. Venkatesan, R.C. Dynes, B. Wilkens, A.E. White, J.M. Gibson, R. Hamm, Comparison of conductivity produced in polymers and carbon films by pyrolysis and high energy ion irradiation Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 1, pp. 599- 604 ,(1984) , 10.1016/0168-583X(84)90130-7
PS Ho, PO Hahn, JW Bartha, GW Rubloff, FK LeGoues, and BD Silverman, None, Chemical bonding and reaction at metal/polymer interfaces Journal of Vacuum Science and Technology. ,vol. 3, pp. 739- 745 ,(1985) , 10.1116/1.573298
S. Pignataro, G. Marletta, O. Puglisi, Binary collisions inducing chemical reactions in 2 keV Ar+ sputtering of Zr and Ti phosphates Chemical Physics. ,vol. 97, pp. 421- 431 ,(1985) , 10.1016/0301-0104(85)87050-6
J.H. Scofield, Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV Journal of Electron Spectroscopy and Related Phenomena. ,vol. 8, pp. 129- 137 ,(1976) , 10.1016/0368-2048(76)80015-1
Orazio Puglisi, Antonio Licciardello, Lucia Calcagno, Gaetano Foti, Molecular weight distribution and solubility changes in ion-bombarded polystyrene Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 19-20, pp. 865- 871 ,(1987) , 10.1016/S0168-583X(87)80173-8
G. Marletta, S. Pignataro, Chemical factors governing the modification of layered phosphates by low-energy ion bombardment Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 19-20, pp. 1013- 1017 ,(1987) , 10.1016/S0168-583X(87)80201-X
B. Wasserman, M. S. Dresselhaus, M. Wolf, G. E. Wnek, J. D. Woodhouse, Transient transport measurement on ion‐implanted polymers Journal of Applied Physics. ,vol. 60, pp. 668- 672 ,(1986) , 10.1063/1.337411