Multimode detection of hydrogen gas Using palladium-covered silicon μ-channels

作者: G. Kaltenpoth , P. Schnabel , E. Menke , E. C. Walter , M. Grunze

DOI: 10.1021/AC034507E

关键词: NanotechnologyOptoelectronicsPalladiumSiliconMulti-mode optical fiberHydrogenChemistry

摘要: Palladium was electrodeposited onto lithographically patterned Si(100) “μ-channels” with dimensions of 2 μm (width) × 100 (length). The properties these Pd-covered Si μ-channels for detecting...

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