作者: E.S. Schlegel
关键词: Electrical engineering 、 Fabrication 、 Materials science 、 Bibliography 、 Insulator (electricity) 、 Hybrid silicon laser 、 Transistor 、 Silicon nitride 、 Semiconductor 、 Silicon 、 Engineering physics
摘要: A bibliography of more than 550 papers in the field metal-insulator-semiconductor theory and technology provides a catalog published work so that investigators can easily relate their to reported by others. In most papers, insulator layer discussed is SiO 2 or silicon nitride, semiconductor silicon. The information has been arranged according following major classifications: MOS transistor behavior physics preparation oxide layers techniques for evaluating related from glass device fabrication radiation effects alternative materials.