Snap action thermal switch
作者： George D. Davis , Stephen F. Becka
DOI:
关键词: Silicon oxide 、 Microelectromechanical systems 、 Materials science 、 Tungsten 、 Composite material 、 Actuator 、 Thermal 、 Silicon
摘要: A simplified snap-action micromachined thermal switch having a bimodal actuator fabricated from non-ductile materials such as silicon, glass, silicon oxide, tungsten, and other suitable using MEMS techniques.
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