Switching structure and method of fabrication

作者: William Paul Kornrumpf , Robert John Wojnarowski

DOI:

关键词:

摘要: A switch structure having a base surface; first high density interconnect (HDI) plastic layer overlying the surface layer; cavity within HDI at least one patterned shape memory alloy (SMA) and cavity, conductive over SMA fixed contact pad attached to movable portion of such that when second layers metallized are in stable position, touches pad, thereby providing an electrical connection forming closed switch. The has position which flexed away from so pads not form open

参考文章(17)
Charles W. Eichelberger, Robert J. Wojnarowski, Excimer laser patterning of a novel resist ,(1988)
Charles Gordon Smith, Bi-stable memory element ,(1994)
Alexander J. Yerman, James G. McMullen, James A. Loughran, Method for producing via holes in polymer dielectrics ,(1987)
Charles William Eichelberger, Robert John Wojnarowski, Multichip integrated circuit packaging configuration and method ,(1986)
Charles W. Eichelberger, Robert J. Wojnarowski, Excimer laser patterning of a novel resist using masked and maskless process steps ,(1988)
Stephen D. Senturia, Joseph H. Haritonidis, Roger T. Howe, Martin A. Schmidt, Turbulent shear force microsensor ,(1988)
Charles W. Eichelberger, B. Welles Ii Kenneth, Robert J. Wojnarowski, Laser beam scanning method for forming via holes in polymer materials ,(1989)
A. David Johnson, Curtis A. Ray, Shape memory alloy film actuated microvalve ,(1993)
Charles W. Eichelberger, B. Welles Ii Kenneth, Robert J. Wojnarowski, Adaptive lithography system to provide high density interconnect ,(1986)