Characterization of nanogenerators based on S-doped zinc oxide nanorod arrays
作者： Kin-Tak Lam , Yen-Lin Chu , Liang-Wen Ji , Yu-Jen Hsiao , Tung-Te Chu
DOI: 10.1007/S00542-020-04863-0
关键词: Doping 、 Nanorod 、 Materials science 、 Hydrothermal circulation 、 Chemical engineering 、 Zinc 、 Electrode 、 Etching (microfabrication) 、 Sputter deposition 、 Substrate (electronics)
摘要: Nanogenerators (NGs) synthesized with sulfur (S) doped zinc oxide (ZnO) nanorods (NRs) by a hydrothermal method were characterized for their performances in this study. The NG formation steps consist of (1) growing the S-doped ZnO NRs on an indium-tin-oxide (ITO) glass substrate, (2) employing ITO etching paste to create electrode pattern, and (3) depositing aluminum (Al) film substrate radio-frequency magnetron sputtering technique final assembly. As found, 5 at.% S exhibit best efficiency among all NRs, optimal operational outputs 150 mV, 0.16 μA, 24 nW, respectively.
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