Mechanism of hydrogen-induced crystallization of amorphous silicon

作者: Saravanapriyan Sriraman , Sumit Agarwal , Eray S. Aydil , Dimitrios Maroudas

DOI: 10.1038/NATURE00866

关键词: Amorphous solidMineralogyAmorphous carbonMaterials scienceNanocrystalNanocrystalline siliconStrained siliconCrystallizationNucleationChemical engineeringAmorphous silicon

摘要: … by the interactions between the hydrogen atoms of the plasma … report the mechanism of hydrogen-induced crystallization of … 5 , we show that crystallization is mediated by the insertion of …

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