Strong Photoluminescence from the Reaction Product of Erbium and Oxygen on Silicon Crystal

摘要: Photoluminescence spectra around 1.5 µm from silicon (Si) doped with erbium (Er) by various methods have been studied. The doping that were adopted annealing after painting of Er(NO3)3 solutions and evaporation Er on Si surface, specimens in the vapour. Strong photoluminescence similar to Er2O3 was observed only damaged surface n-type Czochralski-grown when last method. Analysis method electron spectroscopy for chemical analysis (ESCA) showed generated Cz.Si.