Synthesis, characterization of silicon(IV) compounds containing 2-alkyl-aminopyridine ligands and evaluation of them as CVD precursors

摘要: A family of silicon(IV) compounds, where the Si centers trimethylsilyl (–SiMe3) are linked with 2-alkyl-aminopyridine ligands, has been synthesized by reaction corresponding lithium salt these ligands and SiMe3Cl in a general procedure. They were characterized 1H NMR, 13C 29Si EI-MS elemental analysis necessary. Thereinto, NMR synthesis 2-N,N-bis(trimethylsilyl)aminopyridine achieved for confirmation their coordination structures. Significantly, evaluation silicon compounds containing 2-aminopyridinates as CVD precursors was discussed first time. Thermal stability, transport behavior vapour pressures assessed simultaneous thermal analyses (STA). Chemical vapor deposition accomplished hot wall reactor system to qualitatively demonstrate ability them precursors.