An Amidinato-Cerium Compound and Its Application as CVD Precursor for CeO x -Based Materials
作者： Keyan Wang , Liyong Du , Xinfang Liu , Yuqiang Ding
DOI: 10.1134/S1070427220100109
关键词:
摘要: A cerium compound with asymmetric amidinate ligands [Ce( i PrNC(Me)N t Bu) 3 ] has been reported and characterized in this paper. The compound showed good volatility and thermal …
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