Synthesis and Characterization of Nanostructured Cerium Dioxide Thin Films Deposited by Ultrasonic Spray Pyrolysis

摘要: Nanostructured thin films of cerium dioxide have been prepared on single-crystalline silicon substrates by ultrasonic spray pyrolysis using acetylacetonate as a metal–organic precursor dissolved in anhydrous methanol and acetic acid an additive. The morphology, structure, optical index, electrical properties were studied X-ray diffraction, scanning electron microscopy, atomic force microscopy, ellipsometry, and impedance spectroscopy. use additives is very important to obtain crack-free films. substrate temperature flow rate was optimized for obtaining smooth (Ra <0.4 nm), dense (n>2), homogeneous nanocrystalline with grain sizes as small 10 nm. influence thermal annealing on the structural properties studied. low activation energy calculated total conductivity (0.133 eV) attributed to the nanometric size grains.