Influence of experimental conditions on atom column visibility in energy dispersive X-ray spectroscopy
作者： J.H. Dycus , W. Xu , X. Sang , A.J. D'Alfonso , Z. Chen
DOI: 10.1016/J.ULTRAMIC.2016.08.013
关键词: Energy (signal processing) 、 Dwell time 、 Optics 、 Atom 、 Scanning transmission electron microscopy 、 Energy-dispersive X-ray spectroscopy 、 Molecular physics 、 Signal 、 Chemistry 、 Lattice constant 、 Spectroscopy
摘要: Here we report the influence of key experimental parameters on atomically resolved energy dispersive X-ray spectroscopy (EDX). In particular, examine role probe forming convergence semi-angle, sample thickness, lattice spacing, and dwell/collection time. We show that an optimum specimen-dependent angle exists to maximize signal-to-noise ratio signal in EDX mapping. Furthermore, highlight it can be important select appropriate dwell time efficiently process signal. These practical considerations provide insight for atomic resolution analysis.
sci-hub.se 参考文章(29)
Z. Chen, A.J. D'Alfonso, M. Weyland, D.J. Taplin, L.J. Allen, S.D. Findlay, Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. Ultramicroscopy. ,vol. 157, pp. 21- 26 ,(2015) , 10.1016/J.ULTRAMIC.2015.05.010
Dmitri O. Klenov, Joshua M. O. Zide, Structure of the InAlAs/InP interface by atomically resolved energy dispersive spectroscopy Applied Physics Letters. ,vol. 99, pp. 141904- ,(2011) , 10.1063/1.3645632
James M. LeBeau, Scott D. Findlay, Leslie J. Allen, Susanne Stemmer, Position averaged convergent beam electron diffraction: Theory and applications Ultramicroscopy. ,vol. 110, pp. 118- 125 ,(2010) , 10.1016/J.ULTRAMIC.2009.10.001
Ping Lu, Lin Zhou, M. J. Kramer, David J. Smith, Atomic-scale chemical imaging and quantification of metallic alloy structures by energy-dispersive X-ray spectroscopy. Scientific Reports. ,vol. 4, pp. 3945- 3945 ,(2015) , 10.1038/SREP03945
L.J. Allen, A.J. D׳Alfonso, S.D. Findlay, Modelling the inelastic scattering of fast electrons. Ultramicroscopy. ,vol. 151, pp. 11- 22 ,(2015) , 10.1016/J.ULTRAMIC.2014.10.011
K.A. Mkhoyan, S.E. Maccagnano-Zacher, E.J. Kirkland, J. Silcox, Effects of amorphous layers on ADF-STEM imaging. Ultramicroscopy. ,vol. 108, pp. 791- 803 ,(2008) , 10.1016/J.ULTRAMIC.2008.01.007
P.M. Voyles, J.L. Grazul, D.A. Muller, Imaging individual atoms inside crystals with ADF-STEM Ultramicroscopy. ,vol. 96, pp. 251- 273 ,(2003) , 10.1016/S0304-3991(03)00092-5
C. Dwyer, C. Maunders, C. L. Zheng, M. Weyland, P. C. Tiemeijer, J. Etheridge, Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters Applied Physics Letters. ,vol. 100, pp. 191915- ,(2012) , 10.1063/1.4711766
James M. LeBeau, Scott D. Findlay, Leslie J. Allen, Susanne Stemmer, Quantitative atomic resolution scanning transmission electron microscopy. Physical Review Letters. ,vol. 100, pp. 206101- ,(2008) , 10.1103/PHYSREVLETT.100.206101
A. J. D’Alfonso, B. Freitag, D. Klenov, L. J. Allen, Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy Physical Review B. ,vol. 81, pp. 100101- ,(2010) , 10.1103/PHYSREVB.81.100101