Low Energy Ion Assisted Film Growth

摘要: This is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It addressed to researchers, post-graduates and even engineers with little or no experience in the techniques film deposition. reviews basic concepts related interaction low energy ion beams materials. The main used IAD synthesis films effects beam bombardment on growing films, such as densification, stress, mixing, surface flattening changes texture are critically discussed. A description some applications methods a review by diamond-like carbon cubic-boron nitride complete book.