Lateral/Vertical Semiconductor Device with Embedded Isolator
作者： Michael Shur , Mikhail Gaevski , Remigijus Gaska , Grigory Simin
DOI:
关键词: Isolator 、 Electrical engineering 、 Materials science 、 Semiconductor device 、 Communication channel 、 Optoelectronics
摘要: A lateral/vertical device is provided. The includes a structure including channel having lateral portion and vertical portion. of the can be located adjacent to first surface structure, one or more contacts and/or gate formed on surface. also set insulating layers in between second opposite An opening defines transition region channel. contact
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