Current aperture vertical electron transistors with ammonia molecular beam epitaxy grown P-type gallium nitride as a current blocking layer

作者: Christophe Hurni , Ilan Ben-Yaacov , Ramya Yeluri , Umesh K. Mishra , Srabanti Chowdhury

DOI:

关键词: DopingCurrent (fluid)ApertureBlocking (radio)Layer (electronics)OptoelectronicsTransistorMolecular beam epitaxyMaterials scienceGallium nitride

摘要: A current aperture vertical electron transistor (CAVET) with ammonia (NH3) based molecular beam epitaxy (MBE) grown p-type Gallium Nitride (p-GaN) as a blocking layer (CBL). Specifically, the CAVET features an active buried Magnesium (Mg) doped GaN for purposes. This structure is very advantageous high power switching applications and any device that requires p-GaN its functionality.

参考文章(16)
Matthias Kauer, Valerie Bousquet, Stewart Hooper, Jonathan Heffernan, Katherine L. Johnson, MBE growth of a semiconductor laser diode ,(2004)
Tsutoma Tsukuba Central Yatsuo, Shinsuke Tsukuba Central Harada, Mitsuo Tsukuba Central Okamoto, Kenji Tsukuba Central Fukuda, Silicon carbide mos field-effect transistor and process for producing the same ,(2005)
Toshihide Kikkawa, Kenji Imanishi, Compound semiconductor device and manufacturing method thereof ,(2009)
Christophe A. Hurni, Oliver Bierwagen, Jordan R. Lang, Brian M. McSkimming, Chad S. Gallinat, Erin C. Young, David A. Browne, Umesh K. Mishra, James S. Speck, p-n junctions on Ga-face GaN grown by NH3 molecular beam epitaxy with low ideality factors and low reverse currents Applied Physics Letters. ,vol. 97, pp. 222113- ,(2010) , 10.1063/1.3521388
Y. Pei, C. Poblenz, A.L. Corrion, R. Chu, L. Shen, J.S. Speck, U.K. Mishra, X- and Ka-band power performance of AlGaN/GaN HEMTs grown by ammonia-MBE Electronics Letters. ,vol. 44, pp. 598- 599 ,(2008) , 10.1049/EL:20080669
Srabanti Chowdhury, Man Hoi Wong, Brian L. Swenson, Umesh K. Mishra, Dispersion-free AlGaN/GaN CAVET with low R on achieved with plasma MBE regrown channel with Mg-ion-implanted current blocking layer device research conference. pp. 201- 202 ,(2010) , 10.1109/DRC.2010.5551906
I. Ben-Yaacov, Y.-K. Seck, S. Heikman, S.P. DenBaars, U.K. Mishra, AlGaN/GaN current aperture vertical electron transistors device research conference. pp. 31- 32 ,(2002) , 10.1109/DRC.2002.1029492
Rongming Chu, Robert Coffie, Semiconductor devices with field plates ,(2010)
Srabanti Chowdhury, Brian L. Swenson, Umesh K. Mishra, Enhancement and Depletion Mode AlGaN/GaN CAVET With Mg-Ion-Implanted GaN as Current Blocking Layer IEEE Electron Device Letters. ,vol. 29, pp. 543- 545 ,(2008) , 10.1109/LED.2008.922982
Ilan Ben-Yaacov, Yee-Kwang Seck, Umesh K. Mishra, Steven P. DenBaars, AlGaN/GaN current aperture vertical electron transistors with regrown channels Journal of Applied Physics. ,vol. 95, pp. 2073- 2078 ,(2004) , 10.1063/1.1641520