Double sided container capacitor for a semiconductor device and method for forming same
作者： Thomas M. Graettinger , Marsela Pontoh , Thomas A. Figura
DOI:
关键词: Dielectric layer 、 Container (type theory) 、 Capacitor 、 Semiconductor device 、 Layer (electronics) 、 Materials science 、 Electronic engineering 、 Spark plug 、 Dielectric 、 Composite material 、 Electrical conductor
摘要: A method for forming a double sided container capacitor comprises first top plate layer within recess in dielectric layer, then cell on the layer. Next, and second bottom layers are formed is layers. Finally, electrically connected using conductive plug or spacer. An inventive structure also described.
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