Seebeck Coefficient of Ultrathin Silicon-on-Insulator Layers
作者： Faiz Salleh , Kiyosumi Asai , Akihiro Ishida , Hiroya Ikeda
关键词: Doping 、 Impurity 、 Semiconductor materials 、 Seebeck coefficient 、 Condensed matter physics 、 Materials science 、 Silicon on insulator
摘要: We measured the Seebeck coefficient of P-doped ultrathin silicon-on-insulator (SOI) layers with thicknesses 2–100 nm. The dependence on impurity concentration was investigated, and shown to be in good agreement that bulk Si for SOI above 6 In addition, it found decrease increasing concentration, which is usually observed semiconductor materials. However, doping levels 3.5×1019 cm-3, increase. This likely due influence an band.
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sci-hub.se 参考文章(12)
L. D. Hicks, M. S. Dresselhaus, Thermoelectric figure of merit of a one-dimensional conductor. Physical Review B. ,vol. 47, pp. 16631- 16634 ,(1993) , 10.1103/PHYSREVB.47.16631
T. H. Geballe, G. W. Hull, Seebeck Effect in Silicon Physical Review. ,vol. 98, pp. 940- 947 ,(1955) , 10.1103/PHYSREV.98.940
T. Takabatake, T. Sasakawa, J. Kitagawa, T. Suemitsu, Y. Echizen, K. Umeo, M. Sera, Y. Bando, Thermoelectric properties of Ce-based Kondo semimetals and semiconductors Physica B: Condensed Matter. ,vol. 328, pp. 53- 57 ,(2003) , 10.1016/S0921-4526(02)01808-2
J. P. Heremans, V. Jovovic, E. S. Toberer, A. Saramat, K. Kurosaki, A. Charoenphakdee, S. Yamanaka, G. J. Snyder, Enhancement of Thermoelectric Efficiency in PbTe by Distortion of the Electronic Density of States Science. ,vol. 321, pp. 554- 557 ,(2008) , 10.1126/SCIENCE.1159725
Cavid Erginsoy, Energy States of Overlapping Impurity Carriers in Semiconductors Physical Review. ,vol. 88, pp. 893- 894 ,(1952) , 10.1103/PHYSREV.88.893
Der Sun Lee, J.G. Fossum, Energy-band distortion in highly doped silicon IEEE Transactions on Electron Devices. ,vol. 30, pp. 626- 634 ,(1983) , 10.1109/T-ED.1983.21181
T. P. Brody, Nature of the Valley Current in Tunnel Diodes Journal of Applied Physics. ,vol. 33, pp. 100- 111 ,(1962) , 10.1063/1.1728464
L. Weber, E. Gmelin, Transport properties of silicon Applied Physics A. ,vol. 53, pp. 136- 140 ,(1991) , 10.1007/BF00323873
Walter Baltensperger, CXLIII. On conduction in impurity bands Philosophical Magazine Series 1. ,vol. 44, pp. 1355- 1363 ,(1953) , 10.1080/14786441208520405
Nevill F. Mott, E. A. Davis, Kurt Weiser, Electronic processes in non-crystalline materials ,(1940)