作者: Nur Hasyimah Hashim , Shanmugam Subramani , Mutharasu Devarajan , Abdul Razak Ibrahim
DOI: 10.1007/S10854-015-4187-5
关键词: Thin film 、 Annealing (metallurgy) 、 Grain size 、 Doping 、 Surface roughness 、 Spin coating 、 Crystallite 、 Materials science 、 Crystallization 、 Analytical chemistry
摘要: In this work, the preparation of undoped and Cu doped ZnO thin films by sol–gel spin coating method was reported. Undoped deposited on aluminium silicone substrates followed annealing at three different temperatures (350, 450 550 °C) optimized temperature film for doping Al as 550 °C. The structural properties showed hexagonal crystal structure. such crystallite size, orientation surface annealed samples various are discussed. peak (002) give size within range 0.1–0.4 nm Si substrates. observation that becomes smoother grain increased higher temperature. For ZnO, concentration (0.03 M:Cu, 0.05 M:Cu 0.07 M:Cu) substrate which then undergone 550 °C morphological were investigated using FESEM where smooth with increasing while atomic force microscopy anomalous results roughness particle size. Optical from Fourier transform infrared spectrometer presence functional groups absorption peak. It revealed influence to changes can be seen morphology properties. addition treatment also played role in improving crystallization process.