Study of substrate temperature and copper doping effects on structural, electrical and optical properties of Cu-doped and undoped ZnO thin films
作者： Peipei Zhou , Haonan Liu , Linao Zhang , Xiaoxia Suo , Zhongshuai Liang
DOI: 10.1007/S10854-016-4771-3
关键词:
摘要: Undoped and Cu-doped ZnO (ZnO:Cu) thin films were prepared using magnetron co-sputtering. Effects of substrate temperature $$T_{s}$$ on their structural, electrical optical properties comparatively investigated X-ray diffraction, atom force microscopy, ultraviolet visible spectrophotometer. ZnO:Cu with different doping content studied in order to investigate the effects Cu-doping content. The results show that all exhibit a single phase (002)-oriented hexagonal wurtzite structure. Higher enhances crystallinity reduces compressive stress films. increasing lead rougher surface larger granules. resistivity both increases . Interestingly, band gap $$E_{g}$$ significantly , while undoped film is not obviously influenced by an important factor affecting physical In our experiments, composition sightly decreases increasing. resistivity, leads red-shift absorption edge, narrows
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