Method for producing integrated optical device

作者: Tomokazu Katsuyama , Kenji Hiratsuka

DOI:

关键词: Cladding (fiber optics)Materials scienceOptoelectronicsSemiconductorContact layerElectronic engineering

摘要: A method for producing an integrated optical device includes the steps of growing, on a substrate including first and second regions, stacked semiconductor layer, cladding side-etching layer; etching layer through mask formed region; selectively region, growing third contact layers; forming ridge structure. The step overhang between mask. structure first, second, wet-etching in which layers are etched, respectively.

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