作者: Tomokazu Katsuyama , Kenji Hiratsuka
DOI:
关键词: Cladding (fiber optics) 、 Materials science 、 Optoelectronics 、 Semiconductor 、 Contact layer 、 Electronic engineering
摘要: A method for producing an integrated optical device includes the steps of growing, on a substrate including first and second regions, stacked semiconductor layer, cladding side-etching layer; etching layer through mask formed region; selectively region, growing third contact layers; forming ridge structure. The step overhang between mask. structure first, second, wet-etching in which layers are etched, respectively.