Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

摘要: An accurate computation of electrical force is significant in analyzing the performance microelectromechanical systems and nanoelectromechanical systems. Many analytical empirical models are available for computing forces, especially, a single set parallel plates. In general, these forces computed based on direct electric field between overlapping areas plates fringing effects. Most models, which effect, consider only trivial cases this paper, we propose different obtained from numerical simulations. It found to be useful capacitance as well simple complex configurations consisting an array beams electrodes. For given configurations, compared with results. While percentage error proposed model under 6% respect results, associated without effects $\sim 50$ %. The can applied devices dominant.