Analysis of radial distribution of plasma parameters in a coaxial-line microwave discharge tube
作者： Isamu Kato , Shinji Hara , Shin‐ichi Wakana
DOI: 10.1063/1.332798
关键词: Electron density 、 Plasma 、 Atomic physics 、 Gas-filled tube 、 Skin effect 、 Electric discharge 、 Plasma parameters 、 Electron temperature 、 Chemistry 、 Light intensity
摘要: The discharge mechanism in a coaxial‐line microwave tube that makes uniform plasma along the circumference of has been analyzed. analysis includes skin effect penetration into and equilibrium between generation losses charged particles. It is shown radial distributions electron density temperature can calculated from measured values distribution light intensity. about 1012 cm−3 near center axis column close to trapezoidal shape. 4×104 K wall decreases monotonically toward column.
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