Special issue. Micromachine. Micromachining Technology for Micromachines.

K Minami, Y Wakabayashi, M Yoshida, K Watanabe, M Esashi, YAG laser-assisted etching of silicon for fabricating sensors and actuators Journal of Micromechanics and Microengineering. ,vol. 3, pp. 81- 86 ,(1993) , 10.1088/0960-1317/3/2/008

M Yamaguchi, S Kawamura, K Minami, M Esashi, Control of distributed electrostatic microstructures Journal of Micromechanics and Microengineering. ,vol. 3, pp. 90- 95 ,(1993) , 10.1088/0960-1317/3/2/010

H. Henmi, S. Shoji, Y. Shoji, K. Yoshimi, M. Esashi, Vacuum packaging for microsensors by glass-silicon anodic bonding Sensors and Actuators A-physical. ,vol. 43, pp. 243- 248 ,(1994) , 10.1016/0924-4247(94)80003-0

K. Murakami, Y. Wakabayashi, K. Minami, M. Esashi, Cryogenic dry etching for high aspect ratio microstructures international conference on micro electro mechanical systems. pp. 65- 70 ,(1993) , 10.1109/MEMSYS.1993.296953

K. Minami, H. Tosaka, M. Esashi, Optical in situ monitoring of silicon diaphragm thickness during wet etching international conference on micro electro mechanical systems. pp. 217- 222 ,(1994) , 10.1109/MEMSYS.1994.555626

K. Jono, M. Hashimoto, M. Esashi, Electrostatic servo system for multi-axis accelerometers international conference on micro electro mechanical systems. pp. 251- 256 ,(1994) , 10.1109/MEMSYS.1994.555762

M. Esashi, Y. Matsumoto, Common two lead wires sensing system TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. pp. 330- 333 ,(1991) , 10.1109/SENSOR.1991.148876

C. Cabuz, K. Fukatsu, H. Hashimoto, S. Shoji, T. Kurabayashi, K. Minami, M. Esashi, Fine frequency tuning in resonant sensors international conference on micro electro mechanical systems. pp. 245- 250 ,(1994) , 10.1109/MEMSYS.1994.555760