Ion-beam sculpting time scales.

作者: Derek Stein , Jiali Li , Jene A. Golovchenko

DOI: 10.1103/PHYSREVLETT.89.276106

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摘要: A study of ion sculpting dynamics in SiO2 and SiN using periodically pulsed beams reveals material transport that depends strongly on the time structure beams. It is found significant nanoscale matter can occur over second long scales after beam has been extinguished. simple phenomenological model described terms two scales. The accounts for surprising observation enhanced

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