Interdiffusion and crystallization in HfO2/Al2O3 superlattices
作者： C. Adelmann , J. Kesters , K. Opsomer , C. Detavernier , J. A. Kittl
DOI: 10.1063/1.3223616
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摘要: The interplay of interdiffusion and crystallization in HfO2/Al2O3 superlattices during spike annealing at 1050 °C was studied using x-ray reflectivity diffraction. A transition thermal stability found as a function HfO2 thickness between 2.3 3.2 nm. This is due to crossover amorphous kinetics. For thin HfO2, Al2O3 interdiffuse subsequently crystallize HfAlOx into cubic-HfO2-like phase. thicker layers individually the monoclinic As consequence, suppressed because immiscibility HfO2.
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