Modification of metallic materials and hard coatings using metal ion implantation

摘要: Abstract Ion implantation, with doses in the range 10 16 to 18 ion cm -2 , modifies surface properties of many metallic and ceramic materials. Whilst gas ion beams are currently employed extensively, metal implantation (MII) systems have been developed based on vacuum arc a brief review these is presented. Examples industrial applications given using, primarily, Mo ions which harden steel, increase its corrosion resistance lower coefficient friction alloyed (or implanted) zone, IZ. Extending well beyond this dislocation network hardens material depth. Termed long-range effect occurs alloys low ductility materials such as TiN. Microstructural studies TiN coatings after MII presented together model for development effect. The results show that stress field made by PVD modified but no grain structure found, whereas CVD residual not changed growth fine grains within original observed.