作者: P. Feigl , B. Schueler , F. Hillenkamp
DOI: 10.1016/0020-7381(83)87125-3
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摘要: Abstract A new laser microprobe mass analyser has been developed which allows spectrometry of bulk samples. The beam a Nd - YAG is focused through specially designed objective onto the surface at an angle 30° to normal. generated ions are extracted perpendicularly sample and imaged by ion lens down time-of-flight spectrometer SEM detector. instrument characterized spatial resolution analysis 1 μm, observation about 0.5 substance demand for in picogram range sensitivity % sub-ppm range. basis design features, first analytical results presented.